JPH0429962B2 - - Google Patents

Info

Publication number
JPH0429962B2
JPH0429962B2 JP58049492A JP4949283A JPH0429962B2 JP H0429962 B2 JPH0429962 B2 JP H0429962B2 JP 58049492 A JP58049492 A JP 58049492A JP 4949283 A JP4949283 A JP 4949283A JP H0429962 B2 JPH0429962 B2 JP H0429962B2
Authority
JP
Japan
Prior art keywords
light
mask
wafer
scanning
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58049492A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59174707A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58049492A priority Critical patent/JPS59174707A/ja
Publication of JPS59174707A publication Critical patent/JPS59174707A/ja
Publication of JPH0429962B2 publication Critical patent/JPH0429962B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58049492A 1983-03-24 1983-03-24 位置検出装置 Granted JPS59174707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58049492A JPS59174707A (ja) 1983-03-24 1983-03-24 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58049492A JPS59174707A (ja) 1983-03-24 1983-03-24 位置検出装置

Publications (2)

Publication Number Publication Date
JPS59174707A JPS59174707A (ja) 1984-10-03
JPH0429962B2 true JPH0429962B2 (en]) 1992-05-20

Family

ID=12832643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58049492A Granted JPS59174707A (ja) 1983-03-24 1983-03-24 位置検出装置

Country Status (1)

Country Link
JP (1) JPS59174707A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2503568B2 (ja) * 1988-02-15 1996-06-05 株式会社ニコン 投影露光装置
TWI370894B (en) * 2007-02-26 2012-08-21 Corning Inc Method for measuring distortion
JP5992103B2 (ja) * 2012-07-30 2016-09-14 エーエスエムエル ネザーランズ ビー．ブイ． 位置測定装置、位置測定方法、リソグラフィ装置およびデバイス製造方法

Also Published As

Publication number Publication date
JPS59174707A (ja) 1984-10-03

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